In typical spectroscopic ellipsometry, the optical and geometrical properties of thin film and nano pattern can be
obtained by measuring the polarization state of light reflected/transmitted from the object by rotating a analyzer or a
compensator. We proposed a snapshot spectroscopic ellipsometric system based on a modified Michelson
interferometer to overcome the time-consuring measurement principle due to rotating part. The proposed system
provides spectral ellipsometric parameters (psi, delta) in real time by using a single spectral interference signal
generated in the interferometric polarization module. However, it has a long-term stability problem resulting in
delta(k) drift. In this paper, it is experimentally proved that the drift problem is caused by anisotropic refractive
index change of the beam intersection layer in beam splitter of interferometer.
Key Words : Spectroscopic ellipsometry, Interferometric polarization modulation, Temperature dependency
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