We describe an optimal alignment method for improving accuracy of dynamic spectroscopic polarimeter based on
monolithic polarizing interferometer. The dynamic spectroscopic polarimeter enables real-time measurements of
spectral ellipsometric parameters by using a spectral carrier frequency concept. However, the non-polarizing beam
splitter used in the monolithic polarizing interferometer cannot maintain the polarization state perfectly due to phase
retardation caused by optical anisotropic characteristics of the non-polarizing beam splitter, resulting in degraded
measurement accuracy. The effect of the beam splitter can be minimized through optimal alignment of the polarizers
used in the polarizing interferometer and the analyzer. We demonstrate how much the proposed alignment method can
enhance the measurement accuracy by comparing with previous alignment approach.
Key Words : Spectroscopic Polarimetry, Monolithic Polarizing Interferometer, Beam Splitter, Dielectric Coating
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