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[ OPTICS EXPRESS ]Interferometric snapshot spectro-ellipsometry

Vamara Dembele, Moonseob Jin, Inho Choi, Won Chegal, and Daesuk Kim

Abstract: We propose a snapshot spectroscopic ellipsometry and its applications for realtime thin-film thickness measurement. The proposed system employs an interferometric polarization-modulation module that can measure the spectroscopic ellipsometric phase for thin-film deposited on a substrate with a measurement speed of around 20 msec. It requires neither moving parts nor time dependent modulation devices. The accuracy of the proposed interferometric snapshot spectro-ellipsometer is analyzed through comparison with commercial equipment results.

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Interferometric snapshot spectro-ellipsometry.pdf (2.5 MB)

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