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OML의 저널논문, 특허, 학회지논문에 대한 정보를 공유하는 공간입니다.

[OPTICS COMMUNICATIONS] Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme

A dynamic spectroscopic ellipsometer based on a one-piece interferometric polarization-modulation is described.

the proposed system can provide spectro-ellipsometric parameters Ψ(λ) and Δ(λ) with a real time speed of a few tens of milliseconds for 1,640-points spectra while maintaining high precision of less than 0.02 degrees. The ultrafast measurement capability enables the novel concept to be applied for a dynamic solution by which we can measure even the thin film thickness of moving samples dynamically.

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Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme.pdf (2.5 MB)

광기술연구실
Opitcal Metrology Laboratory

54896 전북 전주시 덕진구 백제대로 567 전북대학교 공과대학 기계시스템공학부 공대 4호관 317호 / Tel : 063-270-4632, Fax : 063-270-2388 / Email : dashi.kim@jbnu.ac.kr