A rapid direct spectroscopic ellipsometric parameter extraction algorithm for computational speed enhancement
of dynamic spectroscopic ellipsometry is described. The proposed direct spectral phase calculation method can
provide a faster spectral phase extraction capability than a Fourier transform-based approach, while maintaining
the same level of accuracy as that based on the Fourier transform method. We analyze some additional benefits and
limitations of the proposed direct computational method in terms of enlarged 1(λ) measurement spectral range
and precision optimization.
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