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OML의 저널논문, 특허, 학회지논문에 대한 정보를 공유하는 공간입니다.

[APPLIED OPTICS] Speed enhancement of dynamic spectroscopic ellipsometry by using direct spectral phase extraction method

A rapid direct spectroscopic ellipsometric parameter extraction algorithm for computational speed enhancement of dynamic spectroscopic ellipsometry is described. The proposed direct spectral phase calculation method can provide a faster spectral phase extraction capability than a Fourier transform-based approach, while maintaining the same level of accuracy as that based on the Fourier transform method. We analyze some additional benefits and limitations of the proposed direct computational method in terms of enlarged 1(λ) measurement spectral range and precision optimization. 
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AO_Direct Filtering.pdf (1.6 MB)

광기술연구실
Opitcal Metrology Laboratory

54896 전북 전주시 덕진구 백제대로 567 전북대학교 공과대학 기계시스템공학부 공대 4호관 317호 / Tel : 063-270-4632, Fax : 063-270-2388 / Email : dashi.kim@jbnu.ac.kr