This paper describes a robust dynamic spectroscopic ellipsometer that can provide a highly accurate and reli- able real-time spectroscopic polarization measurement capability for various in-line nanoscale measurement applications. The robustness of dynamic spectroscopic ellipsometry is enhanced significantly by employing a compensation channel that removes the temperature dependency of the monolithic polarizing interferometric module, and it results in highly accurate dynamic spectral ellipsometric measurements. We present how the mono- lithic interferometer is affected by external disturbances and show experimentally that the proposed scheme can provide a few hundreds of times long-term stability enhancement compared with a single-channel-based dynamic spectroscopic ellipsometer scheme.
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